Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

0441167 - FZÚ 2015 RIV US eng J - Journal Article
Roy, Amitava - Arai, G. - Hara, H. - Higashiguchi, T. - Ohashi, H. - Sunahara, A. - Li, B. - Dunne, P. - O´Sullivan, G. - Miura, Taisuke - Mocek, Tomáš - Endo, Akira
Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source.
Applied Physics Letters. Roč. 105, č. 7 (2014), "074103-1"-"074103-4". ISSN 0003-6951. E-ISSN 1077-3118
R&D Projects: GA MŠMT ED2.1.00/01.0027; GA MŠMT EE2.3.20.0143; GA MŠMT EE2.3.30.0057
Grant - others:HILASE(XE) CZ.1.05/2.1.00/01.0027; OP VK 6(XE) CZ.1.07/2.3.00/20.0143; OP VK 4 POSTDOK(XE) CZ.1.07/2.3.00/30.0057
Institutional support: RVO:68378271
Keywords : laser-produced plasma * dynamics * EUV source * ultraviolet source * targets
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 3.302, year: 2014

We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 lm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.
Permanent Link: http://hdl.handle.net/11104/0244201