Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

0439381 - FZÚ 2015 RIV US eng J - Journal Article
Straňák, V. - Hubička, Zdeněk - Čada, Martin - Drache, S. - Tichý, M. - Hippler, R.
Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges.
Journal of Applied Physics. Roč. 115, č. 15 (2014), "153301-1"-"153301-7". ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA MŠMT LH12043
Grant - others:AV ČR(CZ) M100101215
Institutional support: RVO:68378271
Keywords : electron-impact ionization * physical vapor-deposition * cross-sections * plasma parameters * rate coefficients * low-pressure * energy * atoms * films * ions
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.183, year: 2014

The metal ionized flux fraction and production of double charged metal ions Me2þ of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses. A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction n. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate. The ratio between densities of doubly Me2þ and singly Meþ charged metal ions was determined. It is shown that ECWR assistance enhances Me2þ production with respect of absorbed rf-power.
Permanent Link: http://hdl.handle.net/11104/0242671