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Study of mass and cluster flux in a pulsed gas system with enhancednanoparticle aggregation
- 1.0439292 - FZÚ 2015 RIV US eng J - Journal Article
Drache, S. - Straňák, V. - Hubička, Zdeněk - Berg, F. - Tichý, M. - Helm, C.A. - Hippler, R.
Study of mass and cluster flux in a pulsed gas system with enhancednanoparticle aggregation.
Journal of Applied Physics. Roč. 116, č. 14 (2014), "143303-1"-"143303-7". ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA ČR GAP108/12/2104
Institutional support: RVO:68378271
Keywords : cluster * plasma * magnetron
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.183, year: 2014
The paper is focused on investigation of enhanced metal (Cu) cluster growth in a source of Haberland’s type using pulsed gas aggregation. The aggregation Ar gas was delivered into the cluster source in a pulse regime, which results in the formation of well pronounced aggregation pressure peaks. The pressure peaks were varied by varying the different pulse gas frequency at the same mean pressure kept for all experiments.
Permanent Link: http://hdl.handle.net/11104/0242581
Number of the records: 1