System for contactless gauge blocks measurement

0437615 - ÚPT 2015 RIV US eng C - Conference Paper (international conference)
Buchta, Zdeněk - Řeřucha, Šimon - Mikel, Břetislav - Čížek, Martin - Lazar, Josef - Číp, Ondřej
System for contactless gauge blocks measurement.
8th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI) (Proceedings of SPIE 8759). Bellingham: SPIE, 2013, 875915:1-7. ISBN 9780819495501. ISSN 0277-786X.
[International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI) /8./. Chengdu (CN), 08.08.2012-11.08.2012]
R&D Projects: GA ČR GP102/09/P293; GA ČR GPP102/11/P819; GA ČR GAP102/10/1813; GA MPO FR-TI2/705; GA MŠMT ED0017/01/01; GA MŠMT(CZ) LC06007
Institutional support: RVO:68081731
Keywords : low-coherence interferometry * gauge block * nanometrology
Subject RIV: BH - Optics, Masers, Lasers

This paper presents a novel principle for contactless gauge block measurement using a combination of low-coherence interferometry and laser interferometry. The experimental setup combines a Dowell interferometer and a Michelson interferometer to ensure a gauge block length determination with direct traceability to the primary length standard. This setup was designed for contactless complex gauge block analysis providing information about gauge block length, gauge block faces surface profile (e.g., indication of scratches) and by analysis of the interference fringes shape, also about the gauge block edge flatness distortion. The designed setup is supplemented by an automatic handling system designed for a set of 126 gauge blocks (0.5 mm to 100 mm) to allow the automatic contactless calibration of the complex gauge block set without a human operator.
Permanent Link: http://hdl.handle.net/11104/0241181