Fabrication of 3D diamond membranes for microfluidic systems

0434869 - FZÚ 2018 RIV CZ eng C - Conference Paper (international conference)
Varga, Marián - Babchenko, Oleg - Bauerová, Pavla - Hruška, Karel - Jurka, Vlastimil - Kromka, Alexander - Rezek, Bohuslav
Fabrication of 3D diamond membranes for microfluidic systems.
NANOCON 2014, 6th International Conference. Ostrava: Tanger Ltd, 2015, s. 556-562. ISBN 978-80-87294-53-6.
[International Conference NANOCON /6./. Brno (CZ), 05.11.2014-07.11.2014]
R&D Projects: GA ČR GAP108/12/0996
Institutional support: RVO:68378271
Keywords : nanocrystalline diamond * membranes * microwave plasma * microfluidics * carbon foam
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Perfusion of cell medium, especially in microfluidic devices, can provide in-vivo-like conditions for cell cultures. The most recent demand on such systems is to include electronically active artificial cell support for in-situ monitoring. Diamond thin films exhibit advantageous combination of physical, mechanical, chemical, biocompatible and electronic properties for this purpose. In this work we explore two strategies for fabrication of self-standing three-dimensional nanocrystalline diamond membrane for implementation in microfluidic invivo like experiments: i) nucleation and chemical vapour deposition (CVD) growth of diamond on porous 3D carbon foam (with 80 pores per inch) and ii) selective diamond growth predefined by photolithographic processing using copper grid mask. The morphology and material quality of the fabricated membranes are characterized by scanning electron microscopy and Raman spectroscopy.
Permanent Link: http://hdl.handle.net/11104/0238838