Use systems for the analysis of gas flow

0434641 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Maxa, J. - Neděla, Vilém - Hladká, K. - Vyroubal, P. - Vaculík, S. - Hlavatá, P.
Use systems for the analysis of gas flow.
Workshop of Interesting Topics of SEM and ESEM. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014, s. 40-43. ISBN 978-80-87441-12-1.
[Workshop of Interesting Topics of SEM and ESEM. Mikulov (CZ), 26.08.2014-31.08.2014]
R&D Projects: GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : ESEM * finite volume method
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Environmental scanning electron microscope is explaining withdrawing of two differentially pumped chambers in a drawing area. To solve this problem is used finite volume method. This method includes several steps: - With using of mesh the area is dividing into discrete volume. - Discretization and balancing of the unknown quantities in each finite volume - Numerical solution of discretized equations.
Permanent Link: http://hdl.handle.net/11104/0238654