Nanodiamond

0432021 - FZÚ 2015 RIV GB eng M - Monography Chapter
Ižák, Tibor - Babchenko, Oleg - Potocký, Štěpán - Remeš, Zdeněk - Kozak, Halyna - Verveniotis, Elisseos - Rezek, Bohuslav - Kromka, Alexander
Low temperature diamond growth.
Nanodiamond. Cambridge: The Royal Society of Chemistry, 2014 - (Williams, O.), s. 290-342. ISBN 978-1-84973-639-8
R&D Projects: GA ČR(CZ) GBP108/12/G108
Institutional support: RVO:68378271
Keywords : diamond film * pulsed linear antenna MWCVD * low temperature deposition * temperature sensitive substrates
Subject RIV: BM - Solid Matter Physics ; Magnetism

The present chapter focuses on the low temperature diamond growth from technological and practical point of view. The LTDG process is divided in two strategies based i) on the modification of the deposition systems and ii) on the change of gas chemistry. State of the art of each strategy and involved fundamental growth processes are reviewed. Among the discussed diamond growth processes, microwave surface wave plasma in linear antenna configuration with oxygen containing gas mixture is shown as the most promising process for the LTDG over large areas with high optical and electronic grade material. The growth phenomena observed in the linear antenna microwave plasma provide a simple way to control nano- and poly-crystalline diamond character. A practical comparison between focused and linear antenna microwave plasma is presented on several key studies which utilize the LTDG on amorphous silicon, glass, germanium and optical elements used for IR spectroscopy.
Permanent Link: http://hdl.handle.net/11104/0238283