Ablation of metals by extreme-ultraviolet pulsed laser

0431997 - FZÚ 2015 eng A - Abstract
Lančok, Ján - Pira, P. - Burian, Tomáš - Juha, Libor - Vyšín, Luděk - Zelinger, Zdeněk - Wild, J.
Ablation of metals by extreme-ultraviolet pulsed laser.
E-MRS 2014 SPRING MEETING. Lille: European Materials Research Society, 2014 - (Lippert, T.). J-2-J-2
[E-MRS 2014 Spring Meeting. 26.05.2014-30.05.2014, Lille]
R&D Projects: GA MŠMT(CZ) LM2011029; GA ČR(CZ) GAP108/11/1312
Grant - others:SAFMAT(XE) CZ.2.16/3.1.00/22132
Institutional support: RVO:68378271
Keywords : XUV laser * ablation
Subject RIV: BM - Solid Matter Physics ; Magnetism

Properties of a plasma plume formed on metallic thin films and bulk target irradiated by the focused beam of an extreme-ultraviolet (XUV) capillary-discharge laser were investigated Ablation (and desorption) behaviour of different metals with different physical properties such as Ti, Al, Ag, , Ir, Pd, Pt, Pb and Bi will be reported. For ablation the XUV capillary discharge laser operated at 46.9 nm was used. Langmuir probe was used to determine an electron temperature and plasma density. Although the temperatures seem to be comparable with values obtained in plasmas produced by conventional, long-wavelength lasers, the density is significantly lower. A higher recombination rate in the photoionized plasma could be responsible for the reduced density. The possibilities of metals layer by pulsed XUV laser deposition will be discussed.
Permanent Link: http://hdl.handle.net/11104/0236490