6-axis interferometric coordinates measurement system for nanometrology

0431959 - ÚPT 2015 RIV US eng C - Conference Paper (international conference)
Hrabina, Jan - Lazar, Josef - Klapetek, P. - Valtr, M. - Číp, Ondřej - Oulehla, Jindřich - Čížek, Martin - Holá, Miroslava - Šerý, Mojmír
6-axis interferometric coordinates measurement system for nanometrology.
Photonic Instrumentation Engineering (Proceedings of Spie 8992). Bellingham: SPIE, 2014, 89920W:1-8. ISSN 0277-786X.
[Photonic Instrumentation Engineering. San Francisco (US), 02.02.2014-05.02.2014]
R&D Projects: GA ČR GPP102/11/P820; GA MŠMT ED0017/01/01; GA MŠMT EE2.4.31.0016; GA TA ČR TA02010711; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : nanometrology * AFM * nanoscale * nanopositioning interferometry
Subject RIV: BH - Optics, Masers, Lasers

We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
Permanent Link: http://hdl.handle.net/11104/0236468