Measurement of coherence properties of scanning electron microscope

0431335 - ÚPT 2015 CZ eng A - Abstract
Řiháček, Tomáš - Lenc, M. - Müllerová, Ilona
Measurement of coherence properties of scanning electron microscope.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 65. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
R&D Projects: GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : coherence * diffraction * scanning electron microscope
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Coherence of an electron beam is an important characteristic in the transmission electron microscope. It can be determined through the visibility of interference fringes in a diffraction pattern. On the other hand, the coherence of the beam is not usually important for the standard applications of a scanning electron microscope (SEM). Nevertheless it can be of importance for some specific cases. We make use of the experimental setup similar to that used in [1]. The arrangement is shown in Fig. 1, where the diffraction grating is approximately translationally invariant with respect to the both transverse directions. In the interpretation of diffraction pattern we consider the effect of both non-vanishing source size and finite energy spread of the electron beam. The chromatic aberration of the objective lens is taken into account as well.
Permanent Link: http://hdl.handle.net/11104/0236396