Generation and application of the soft X-ray laser beam based on capillary discharge

0429496 - ÚFP 2015 RIV GB eng C - Conference Paper (international conference)
Frolov, Oleksandr - Koláček, Karel - Štraus, Jaroslav - Schmidt, Jiří - Prukner, Václav - Shukurov, A.
Generation and application of the soft X-ray laser beam based on capillary discharge.
Journal of Physics: Conference Series. Vol. 511. Bristol: IOP Publishing, 2014, s. 012035-012035. IOPscience, 511. ISSN 1742-6596.
[International Congress on Plasma Physics (ICPP2010) & 13th Latin American Workshop on Plasma Physics (LAWPP2010)/15./. Santiago (CL), 08.08.2010-13.08.2010]
Institutional support: RVO:61389021
Keywords : Soft X-ray laser * capillary discharge * laser ablation * EUV laser
Subject RIV: BL - Plasma and Gas Discharge Physics
http://iopscience.iop.org/1742-6596/511/1/012035/pdf/1742-6596_511_1_012035.pdf

In this work we report on the generation and characterization of a focused soft X-ray laser beam with intensity and energy density that exceed the threshold for the ablation of PMMA. We demonstrate a feasibility of direct ablation of holes using a focused soft X-ray laser beam. Ablated craters in PMMA/gold-covered-PMMA samples were obtained by focusing the soft X-ray Ar8+ laser pulses generated by a 46.9 nm tabletop capillary-discharge-pumped driver with a spherical Si/Sc multilayer mirror. It was found that the focused beam is capable by one shot to ablate PMMA, even if the focus is significantly influenced by astigmatism. Analysis of the laser beam footprints by atomic force microscope shows that ablated holes have periodic surface structure (similarly as Laser-Induced Periodic Surface Structure) with period ~2,8 μm and with peak-to-peak depth ~5-10 nm.
Permanent Link: http://hdl.handle.net/11104/0234601