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Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes
- 1.0424263 - FZÚ 2014 DE eng A - Abstract
Potocký, Štěpán - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Davydova, Marina - Rezek, Bohuslav - Kromka, Alexander
Characterization of microwave surface wave plasma in linear configuration and growth of nano-sized carbon allotropes.
537. WE Heraeus Seminar. Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. Dresden: Wilhelm und Else Heraeus-Stiftung, 2013 - (Gemming, S.; Abrasonis, G.; Vinnichenko, M.). s. 75-76
[WE-Heraeus-Seminar /537./ - Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends. 26.06.2013-28.06.2013, Dresden]
R&D Projects: GA TA ČR TA01011740; GA MŠMT(CZ) LM2011026; GA ČR GAP205/12/0908
Institutional support: RVO:68378271
Keywords : microwave plasma * CVD deposition
Subject RIV: BL - Plasma and Gas Discharge Physics
Recently design and optimization of the microwave plasma CVD techniques has reached matured state. Design and optimization of microwave plasma reactors is dominated by high pressure systems (10 to 100kPa).
Permanent Link: http://hdl.handle.net/11104/0230378
Number of the records: 1