Properties of linear antenna microwave plasma and growth of various carbon nano-forms

0423296 - FZÚ 2014 AT eng A - Abstract
Potocký, Štěpán - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Davydova, Marina - Kromka, Alexander
Properties of linear antenna microwave plasma and growth of various carbon nano-forms.
International Winterschool on Electronic Properties of Novel Materials /27./. Kirchberg: Kirchberg, 2013 - (Machon, M.; Herziger, F.). s. 150-151
[International Winterschool on Electronic Properties of Novel Materials /27./. 02.03.2013-09.03.2013, Kirchberg]
R&D Projects: GA ČR GAP205/12/0908
Institutional support: RVO:68378271
Keywords : diamond * CNT * graphen * linear antenna plasma
Subject RIV: BM - Solid Matter Physics ; Magnetism

In the presented work we used PLAMWP to grow various carbon forms (i.e. carbon nanotubes, carbon nano-walls/sheets, graphene or even diamond). A complex correlation between process parameters, plasma characteristics and the deposit is presented. Spatially resolved Langmuir probe measurements were done to calculate plasma temperature, density of species, plasma potentials, etc. We found that transformation from poly- to nanocrystalline diamond growth is signicantly influenced by plasma temperature and density, especially for pressures lower than 50 Pa. Carbon nanotubes or nanowalls are controlled by substrate bias, and further decreasing of pressure down to 6 Pa was required to grow oriented carbon structures over large areas (> 100cm2). A crucial technological parameter in the linear antenna CVD system is either using dc or rf substrate bias. A plasma treatment of carbon nanotubes or diamond to control their wetting properties in a such universal system will be further presented.
Permanent Link: http://hdl.handle.net/11104/0229418