Performance of metal Hall sensors based on copper

0422898 - ÚFP 2014 RIV CH eng J - Journal Article
Sentkerestiová, J. - Ďuran, Ivan - Kovařík, Karel - Viererbl, L. - Kohout, Michal
Performance of metal Hall sensors based on copper.
Fusion Engineering and Design. Roč. 88, 6-8 (2013), s. 1310-1314. ISSN 0920-3796. E-ISSN 1873-7196.
[Symposium on Fusion Technology (SOFT-27)/27./. Liège, 24.09.2012-28.09.2012]
R&D Projects: GA MŠMT 7G10072; GA MŠMT(CZ) LM2011021
Grant - others:EUROATOM(XE) FU07-CT-2007-00060
Institutional support: RVO:61389021 ; RVO:68378271
Keywords : Metal Hall sensor * Magnetic diagnostics * Copper Hall sensor * Fusion reactors * Neutron irradiation
Subject RIV: BL - Plasma and Gas Discharge Physics; BM - Solid Matter Physics ; Magnetism (FZU-D)
Impact factor: 1.149, year: 2013
http://www.sciencedirect.com/science/article/pii/S0920379613001701#

We investigated potential of metal Hall sensors based on copper for steady state magnetic measurements on future fusion reactors. Prototype sensors were designed as thin copper active layer deposited on Al2O3 Direct Bond Copper (DBC) ceramic substrates with etched 0.127 mm thick copper contact areas and ceramic adhesive encapsulation. The active layers with thickness bellow I mu m were fabricated by two alternative methods: vapour deposition and magnetron sputtering. The sensors reached the theoretically expected sensitivity values and showed repeatedly nearly no dependence of sensitivity on temperature up to 250 degrees C. We observed no effect of neutron irradiation on sensors properties up to the total neutron fluence of 10(18) cm(-2).
Permanent Link: http://hdl.handle.net/11104/0229028