Short-range six-axis interferometer controlled positioning for local probe microscopy

0422393 - ÚPT 2014 ME eng A - Abstract
Lazar, Josef - Hrabina, Jan - Buchta, Zdeněk - Číp, Ondřej - Čížek, Martin - Oulehla, Jindřich
Short-range six-axis interferometer controlled positioning for local probe microscopy.
21th annual International Conference on Advanced Laser Technologies ALT´13. Book of Abstracts. Budva: University of Montenegro, 2013.
[ALT´13. Annual International Conference on Advanced Laser Technologies /21./. 16.09.2013-20.09.2013, Budva]
R&D Projects: GA ČR GPP102/11/P820; GA MŠMT ED0017/01/01; GA MŠMT EE2.4.31.0016; GA TA ČR TA02010711; GA TA ČR TE01020233
Institutional support: RVO:68081731
Keywords : SIX-AXIS interferometer * local probe microscopy
Subject RIV: BH - Optics, Masers, Lasers

We present a design of nanometrology measuring setup is part of a design of the national standard for nanometrology to be operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system uses a full six-axis interferometric measurement of the position of the sample holder with six independent interferometers. The concept of nanometrology system combining local probe microscopy and interferometric measuring and controlled positioning presented here represents one of a variety of possible approaches. A small range system based on a commercial nanopositioning stage driven by piezoelectric transducers with the overall range 200×200×10 μm was used. Due to the geometric configuration with a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup goes down to tens of nanoradians and servo control of in all six axes of freedom allows to keep guidance errors below 100 nrad. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system.
Permanent Link: http://hdl.handle.net/11104/0228539