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Narrowband laser-based ultrasonic technique for thin film characterization

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    0422089 - ÚT 2014 JP eng A - Abstract
    Stoklasová, Pavla - Landa, Michal - Sedlák, Petr - Seiner, Hanuš - Trnka, Jan
    Narrowband laser-based ultrasonic technique for thin film characterization.
    3rd International Symposium on Laser Ultrasonics and Advanced Sensing. Japan: JSNDI, 2013. s. 44-44.
    [LU2013. 25.06.2013-28.06.2013, Yokohama]
    R&D Projects: GA ČR GPP101/12/P428; GA ČR(CZ) GA101/09/0702
    Institutional support: RVO:61388998
    Keywords : laser-based ultrasonic method * thin-layer * spatial light modulator * dispersion curve
    Subject RIV: BI - Acoustics

    Thin-layer structures can be found in a wide range of applications such as in microelectronics, biotechnology, optics and other areas of technology. The increasing number of existing and potential applications results in an unceasing demand for measuring methods that provide us with material characterization of thin films and coatings. This knowledge is critical for the optimal fabrication of thin-films and the resulting performance of the products with integrated thin-layered components.
    Permanent Link: http://hdl.handle.net/11104/0228812

     
     
Number of the records: 1