Imaging with a STEM detector, experiments vs. simulation

0420837 - ÚPT 2014 DE eng C - Conference Paper (international conference)
Mika, Filip - Novotný, Peter - Konvalina, Ivo
Imaging with a STEM detector, experiments vs. simulation.
Microscopy conference (MC) 2013. Proceedings. Vol. 2. Regensburg: University of Regensburg, 2013, s. 51-52.
[Microscopy Conference 2013. Regensburg (DE), 25.08.2013-30. 08.2013]
R&D Projects: GA TA ČR TE01020118; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : STEM * image contrast * Monte Carlo simulations * transmitted electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Scanning transmission electron microscopy (STEM) is a combination of transmission electron microscopy and scanning electron microscopy (SEM). The electron microscope in STEM scans a focused beam of electrons across the sample in a raster pattern. Interactions between the beam electrons and the atoms on the sample generate transmitted electrons (TE) that are detected by a STEM detector below the sample [1]. The aim of this study is to find out the angular and energy distribution of the TEs that are very important for the understanding of image formation in STEM. The study was done by both an experiment and a simulation.
Permanent Link: http://hdl.handle.net/11104/0227315