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Formation of excited Ag atoms in sputtering of silver
- 1.0411215 - UTIA-B 20030202 RIV US eng J - Journal Article
Šroubek, Zdeněk - Šroubek, Filip - Wucher, A. - Yarmoff, J. A.
Formation of excited Ag atoms in sputtering of silver.
Physical Review. B. Roč. 68, č. 11 (2003), s. 1-5. ISSN 1098-0121
Grant - others:NSF(US) INT-9900469; NSF(US) CHE-0091328
Institutional research plan: CEZ:AV0Z1075907
Keywords : electronic excitation * sputtering
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 2.962, year: 2003
http://library.utia.cas.cz/prace/20030202.pdf
A model is presented for the formation of excited Ag atoms during sputtering of Ag metal by energetic Ar ions. The essential part of the formation process is the slow diffusion of 4d holes in the collision cascade from the sites of violent Ag-Ag collisions to the emitted Ag atoms. A computer simulation of Ag cascades and of the 4d-hole transport allows us to quantify the model and to describe all characteristic features of the available experimental data.
Permanent Link: http://hdl.handle.net/11104/0131301
Number of the records: 1