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Correction of the Interpolation Error of Quadro-Phase Detection in Interferometry
- 1.0404159 - UIVT-O 201485 AU eng C - Conference Paper (international conference)
Hakl, František - Šmíd, M. - Šebek, P. - Balling, P.
Correction of the Interpolation Error of Quadro-Phase Detection in Interferometry.
Proceedings of Conference on Precision Elektromagnetic Measurment. Sydney, 2000 - (Hunter, J.; Johnson, L.), s. 267-271. ISBN 0-7803-5744-2.
[Conference on Precision Electromagnetic Measurment. Sydney (AU), 14.05.2000-19.05.2000]
Laser interferometers using quadro-phase detectors for the fringe counting are frequently used for ultra-precise displacement measurements. The accuracy of interferometers in nanometrology is limited mainly by the interpolation error of the detector system. The new method based on applications of curve fitting using nonlinear last square method was developed for correcting the interpolation error of quadro-phase detectors. The results from the experimental data obtained in interferometrical comparator CMI IK-1 are presented.
Permanent Link: http://hdl.handle.net/11104/0124426
Number of the records: 1