Large area growth of functional and electronic-grade diamond thin films - today's reality

0399675 - FZÚ 2014 RIV SK eng C - Conference Paper (international conference)
Kromka, Alexander - Babchenko, Oleg - Ižák, Tibor - Varga, Marián - Potocký, Štěpán - Rezek, Bohuslav
Large area growth of functional and electronic-grade diamond thin films - today's reality.
Progresívne materiály a vákuum ( Progressive materials and vacuum). Bratislava: Slovenská vakuová spolocnosť, 2012 - (Varga, M.; Veselý, M.; Vincze, A.), s. 11-14. ISBN 978-80-971179-0-0.
[School of Vacuum Technology /15./ ( Progressive materials and vacuum). Štrbské pleso (SK), 08.11.2012-11.11.2012]
R&D Projects: GA ČR(CZ) GAP108/11/0794; GA ČR GAP108/12/0910
Institutional support: RVO:68378271
Keywords : diamond thin films * large area deposition * linear plasma * pressure
Subject RIV: BM - Solid Matter Physics ; Magnetism

Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented.
Permanent Link: http://hdl.handle.net/11104/0226900