Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

0391436 - FZÚ 2014 RIV GB eng J - Journal Article
Sushkov, V. - Do, H.T. - Čada, Martin - Hubička, Zdeněk - Hippler, R.
Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges.
Plasma Sources Science & Technology. Roč. 22, č. 1 (2013), 1-10. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA ČR(CZ) GAP205/11/0386; GA ČR GAP108/12/2104
Institutional research plan: CEZ:AV0Z10100522
Keywords : absorption spectroscopy * diode laser * magnetron * argon metastable * HiPIMS * titanium * time-resolved
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 3.056, year: 2013
http://iopscience.iop.org/0963-0252/22/1/015002/

Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion.
Permanent Link: http://hdl.handle.net/11104/0220477