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Diamond films deposited by oxygen-enhanced linear plasma chemistry
- 1.0391177 - FZÚ 2013 CZ eng A - Abstract
Kromka, Alexander - Babchenko, Oleg - Ižák, Tibor - Varga, Marián - Krátká, Marie - Rezek, Bohuslav
Diamond films deposited by oxygen-enhanced linear plasma chemistry.
Development of Materials Science in Research and Education, Book of Abstracts of the 22nd Joint Seminar. Praha: Czechoslovak Association for Crystal Growth (CSACG), 2012 - (Kožíšek, Z.; Nitsch, K.). s. 44-44. ISBN 978-80-260-2357-9.
[Joint Seminar – Development of materials science in research and education /22./. 03.09.2012-07.09.2012, Lednice]
R&D Projects: GA ČR(CZ) GBP108/12/G108; GA ČR GAP108/12/0996
Institutional research plan: CEZ:AV0Z10100521
Keywords : diamond * growth rate
Subject RIV: BM - Solid Matter Physics ; Magnetism
Adding CO2 to the hydrogen rich gas mixture (H2+CH4) has a significant influence not only on the plasma gas chemistry (conc. of atomic hydrogen) but also on the diamond growth kinetic (growth rate).
Permanent Link: http://hdl.handle.net/11104/0220052
Number of the records: 1