Thin Films

0391139 - ÚCHP 2013 SI eng C - Conference Paper (international conference)
Šolcová, Olga
Thin Films.
Programme. Maribor: Univerza v Mariboru, 2013.
[Nanofuture. Maribor (SI), 03.02.2013-07.02.2013]
R&D Projects: GA TA ČR TA01020804
Institutional support: RVO:67985858
Keywords : sol-gel methods * thin films * nannomaterials
Subject RIV: CI - Industrial Chemistry, Chemical Engineering

Thin films with uniform nanoparticles can be prepared have been prepared by chemical, physica-chemical and physical ways. Between physical ways belong laser ablation and sputtering. The well-known physical-chemical way are chemical vapor deposition, plasma enhanced CVD and sputtering with chemical reaction. Chemical methods based on sol-gel principles are well-known as the most common and successful wet-chemical technique for the nanosized metallic oxides material fabrication. These methods possess several advantages. It is possible to use laboratory conditions, low temperature processing. Resulting thin layers possess the really good homogeneity for any multi-component material and molecular templating as well doping by metal in simple step can be used to obtain the controlled structure, suitable porosity, morphology, particles sizes and even the chemical composition of the final materials. Thus, sol-gel method is a versatile tool for making advanced catalytic materials.
Permanent Link: http://hdl.handle.net/11104/0220037