Comparative Study on Hydrogenated and Deuterated Amorphous Carbon Films Deposited by RF PECVD

0388594 - ÚJF 2013 RIV AT eng C - Conference Paper (international conference)
Buršíková, V. - Stoica, A. - Peřina, Vratislav - Mikšová, Romana - Slavíček, P. - Mocanu, V.
Comparative Study on Hydrogenated and Deuterated Amorphous Carbon Films Deposited by RF PECVD.
Conference Series, XVIIIth Symposium on Atomic, Cluster and Surface Physics 2012. Innsbruck: Innsbruck univesity press, 2012, s. 242-246. ISBN 978-3-902719-52-2.
[XVIIIth Symposium on Atomic, cluster and Surface Physics 2012 (SAPS 2012). Alpe d´Huez (FR), 22.01.2012-27.01.2012]
R&D Projects: GA ČR GA202/07/1669
Institutional support: RVO:61389005
Keywords : hydrogenated carbon thin films * deuterated carbon thin films * PECVD * RBS * ERDA * OES * coating properties
Subject RIV: BL - Plasma and Gas Discharge Physics
http://www.uibk.ac.at/iup/buch_pdfs/it_sasp_2012sw_131211.pdf

The aim of this work is to characterize and compare the properties of hydrogenated carbon thin films (HDLC) and deuterated carbon thin films (DDLC) deposited by r.f. plasma enhanced chemical vapor deposition (PECVD) from two different precursor mixtures methane/hydrogen (CH4/H2) and methane/deuterium (CH4/D2) on single crystalline silicon substrates. Complete atomic compositions, including hydrogen and deuterium content, were determined by combination of RBS and ERD analyses. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion and internal stress. The results were completed by advanced plasma diagnostics performed by means of optical emission spectroscopy (OES).
Permanent Link: http://hdl.handle.net/11104/0217493