Comparison of noise properties of laser sources intended for multidimensional interferometric tools

0388105 - ÚPT 2013 RIV US eng C - Conference Paper (international conference)
Hrabina, Jan - Lazar, Josef - Číp, Ondřej
Comparison of noise properties of laser sources intended for multidimensional interferometric tools.
CPS 2012. 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings of SPIE Vol.8697). Bellingham: SPIE, 2012, s. 869716: 1-10. ISBN 978-0-8194-9481-8.
[CPS 2012. Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /18./. Ostravice (CZ), 03.09.2012-07.09.2012]
R&D Projects: GA ČR GPP102/11/P820; GA ČR GA102/09/1276; GA AV ČR KAN311610701; GA MŠMT ED0017/01/01; GA MŠMT(CZ) LC06007; GA TA ČR TA02010711
Institutional support: RVO:68081731
Keywords : interferometry * lasers noise * nanometrology * atomic force microscopy
Subject RIV: BH - Optics, Masers, Lasers

This work is oriented towards investigation of displacement measurement uncertainty contribution of different laser sources that are suitable for powering multidimensional interferometric positioning system for local probe microscopy. Main aim of this work was to find a suitable laser source for this measuring system. Most common 633 nm He-Ne lasers were compared with 532 nm frequency-doubled Nd:YAGs of different construction (external cavity doubling, ring configuration laser). We investigated amplitude and frequency noise of several lasers intended for micro- and nano- CMMs (coordinate measurement machines) and compared their noise properties together with the aim to find the best option. Amplitude noise measurements were done directly with the help of low noise photodetector, frequency noise of tested lasers was measured by two approaches – first with the help of Fabry-Perot resonator, which was used as a frequency discriminator converting a frequency (phase) noise into the amplitude one and second directly with the help of interferometer – measuring of interferometric fringe signal and position evaluation – another type of frequency discriminator. Both frequency noise and also amplitude noise measurements were done simultaneously to have a chance to compare both approaches and results.
Permanent Link: http://hdl.handle.net/11104/0217087