Number of the records: 1
Direct nano-structuring of solid surface by extreme ultraviolet Ar8+ laser (poster P06.6)
- 1.0386542 - ÚFP 2013 US eng A - Abstract
Koláček, Karel - Štraus, Jaroslav - Schmidt, Jiří - Frolov, Oleksandr - Prukner, Václav - Melich, Radek - Choukourov, A. - Sobota, Jaroslav - Fořt, Tomáš
Direct nano-structuring of solid surface by extreme ultraviolet Ar8+ laser (poster P06.6).
The 56th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication, Program Guide. Waikoloa, Hawaii: IEEE, 2012. s. 24-24. ISBN N.
[International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication/56./. 29.05.2012-01.06.2012, Waikoloa, Hawaii]
R&D Projects: GA MŠMT LA08024
Institutional research plan: CEZ:AV0Z20430508
Institutional support: RVO:68081731
Keywords : nano-patterning by Ar8+ laser * ablation * desorption * direct engraving of 2D diffraction pattern
Subject RIV: BL - Plasma and Gas Discharge Physics; JA - Electronics ; Optoelectronics, Electrical Engineering (UPT-D)
It is described not only the interaction of extreme ultraviolet radiation of various fluences with solid surface (the desorption regime as well as the ablation one can be distinguished), but also a nano-structuring of this surface digging out by this radiation 2D diffraction pattern created in windows of covering grid.
Permanent Link: http://hdl.handle.net/11104/0220188
Number of the records: 1