Education and research at clean room laboratory for silicon device technology at Masaryk University

0386448 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Mikulík, P. - Humlíček, J. - Hovorka, Miloš - Kulha, P. - Kadlec, F.
Education and research at clean room laboratory for silicon device technology at Masaryk University.
Physic and Nanoscale. (Proceedings of the 10th IUVSTA International Summer School ). Praha: IOP AS CR, 2012 - (Fejfar, A.; Vetushka, A.). ISBN 978-80-260-0619-0.
[Physics at Nanoscale. IUVSTA International Summer School /10./. Devět skal (CZ), 30.05.2012-04.06.2012]
Institutional support: RVO:68081731
Keywords : silicon device technology * education and research * clean room laboratory
Subject RIV: BH - Optics, Masers, Lasers

Masaryk University is operating a clean room laboratory for silicon device technology since April 2007. The laboratory has been designed in partnership with ON Semiconductor Czech Republic. The University covered the construction costs and the company provided guidance during zhe design and construction of the clean rooms and managed supply, installation and start-up of the technology equipment.
Permanent Link: http://hdl.handle.net/11104/0215746