RBS, RBS-channeling, ERDA and TOF-ERDA Analysis for the Applications in Optics, Electronics and Other Material Applications, Nano-Structure Synthesis Using Ion Implantation

0384518 - ÚJF 2013 eng C - Conference Paper (international conference)
Macková, Anna - Toms, Petr
RBS, RBS-channeling, ERDA and TOF-ERDA Analysis for the Applications in Optics, Electronics and Other Material Applications, Nano-Structure Synthesis Using Ion Implantation.
2012.
[IWNPTA 2012. Bucharest-Magurele (RO), 01.11.2012-02.11.2012]
R&D Projects: GA ČR GA106/09/0125
Grant - others:UJEP IGA 53222 15 0003 01
Institutional support: RVO:61389005
Keywords : RBS * RBS-channeling * ERDA * TOF-ERDA
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders

Material research belongs to traditionally progressive fields of technology. Its products are used in the everyday life worldwide. Due to the continuous miniaturization, the underlying structures are far beyond the analytical limits of the most of conventional methods. Nuclear analytical methods provide this possibility as they use probes of similar or much smaller dimensions. The overview of activities in the Tandetron Laboratory equipped by the Tandetron 4130 MC; a compact, multipurpose electrostatic tandem accelerator system produced by High Voltage Engineering Europa B.V; will be presented. Tandetron accelerator is producing ion beams with energies in the range from 400 keV to 24 MeV of almost all elements of the periodic system for the trace element analysis by means of the nuclear analytical methods. The main laboratory accessories are devices for material characterization by standard nuclear analytical techniques (RBS, RBS-channeling, ERDA, ERDA-TOF, PIXE, PIGE, and Ion-Microprobe with 1 um lateral resolution) and for high-energy implantation. Staff qualification and the parameters of the experimental devices of the laboratory are fully comparable to similar ones worldwide. With this equipment the laboratory is unique in the Czech Republic and it is able to meet all specific demands of Czech and foreign research organizations.
Permanent Link: http://hdl.handle.net/11104/0214141