Sub- and Supercritical Water As a New Agent for Microdevices Production

0381023 - ÚIACH 2013 PL eng A - Abstract
Karásek, Pavel - Grym, Jakub - Roth, Michal - Foret, František - Planeta, Josef
Sub- and Supercritical Water As a New Agent for Microdevices Production.
Abstract Book. 29th International Symposium on Chromatography,. Toruń: Adam Marszałek, 2012 - (Węgłowska, J.). s. 650. ISBN 978-83-7780-440-7.
[International Symposium on Chromatography /29./. 09.09.2012-13.02.2012, Toruń]
R&D Projects: GA MŠMT(CZ) CZ.1.07/2.3.00/20.0182; GA ČR(CZ) GAP106/12/0522; GA ČR(CZ) GAP206/11/0138
Institutional support: RVO:68081715
Keywords : lab-on-a-chip * substrate leaching * supercritical water
Subject RIV: CB - Analytical Chemistry, Separation

Application was investigated of supercritical water as the leaching agent in production of microchannels in the glass substrates for microchip fabrication. Supercritical water appears to provide certain advantages over the more traditional leaching agents containing hydrofluoric acid.
Permanent Link: http://hdl.handle.net/11104/0211587