Collection contrast in the immersion objective lens of the scanning electron microscope

0379933 - ÚPT 2012 RIV CZ eng C - Conference Paper (international conference)
Müllerová, Ilona - Konvalina, Ivo - Mika, Filip
Collection contrast in the immersion objective lens of the scanning electron microscope.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), -, -, s. 49-50. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA MPO FR-TI3/323
Institutional support: RVO:68081731
Keywords : scanning electron microscope * cathode lens * secondary electrons * backscattered electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens (OL) alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups.
Permanent Link: http://hdl.handle.net/11104/0210780