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Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope
- 1.0379916 - ÚPT 2012 RIV AU eng C - Conference Paper (international conference)
Müllerová, Ilona - Konvalina, Ivo - Hovorka, Miloš - Mika, Filip
Approaches to the Collection Contrast in the Immersion Objective Lens of the Scanning Electron Microscope.
Coneference Proceedings APMC-10, ICONN 2012 and ACMM-22. Wembley: EECW Pty Ltd, 2012, 410:1-2. ISBN 978-1-74052-245-8.
[Asia-Pacific Microscopy Conference (APMC-10) - International Conference on Nanoscience and Nanotechnology (ICONN 2012) - Australian Conference on Microscopy and Microanalysis (ACMM-22). Perth (AU), 05.02.2012-09.02.2012]
R&D Projects: GA MPO FR-TI3/323
Institutional support: RVO:68081731
Keywords : scanning electron microscopy * cathode lens * secondary electrons * backscattered electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups.
Permanent Link: http://hdl.handle.net/11104/0210767
Number of the records: 1