Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser

0377054 - ÚFP 2013 RIV US eng J - Journal Article
Koláček, Karel - Štraus, Jaroslav - Schmidt, Jiří - Frolov, Oleksandr - Prukner, Václav - Shukurov, A. - Holý, V. - Sobota, Jaroslav - Fořt, Tomáš
Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser.
Laser and Particle Beams. Roč. 30, č. 1 (2012), s. 57-63. ISSN 0263-0346. E-ISSN 1469-803X.
[International Conference on the Frontiers of Plasma Physics and Technology/5./. Singapore, 18.04.2011-22.04.2011]
R&D Projects: GA MŠMT LA08024; GA MŠMT(CZ) LC528; GA AV ČR KAN300100702
Institutional research plan: CEZ:AV0Z20430508
Institutional support: RVO:68081731 ; RVO:61389021
Keywords : Ablation by EUV radiation * application of Ar8+ laser * nano-patterning by EUV radiation * , nano-structuring by EUV radiation
Subject RIV: BL - Plasma and Gas Discharge Physics; BH - Optics, Masers, Lasers (UPT-D)
Impact factor: 2.016, year: 2012

It is demonstrated the patterning of polymethylmethacrylate (PMMA) by ablation with Ar8+ ion laser (lambda = 46.9 nm) pumped by pulse, high-current, capillary-discharge. For focusing a long-focal spherical mirror (R = 2100 mm) covered by 14 double-layer Sc-Si coating was used. The ablated focal spots demonstrate not only that the energy of our laser is sufficient for such experiments, but also that the design of focusing optics must be more sophisticated: severe aberrations were revealed - an irregular spot shape and strong astigmatism with astigmatic difference as large as 16 mm. In some cases, on the bottom of ablated spots a laser-induced periodic surface structure appeared. Finally, an illumination of the sample through quadratic hole 7.5 x 7.5 mu m in grid, standing in contact with PMMA substrate ablated from the surface a strongly developed two-dimensional diffraction pattern (period in the center about 125 nm).
Permanent Link: http://hdl.handle.net/11104/0209312