Number of the records: 1
Diamond chemical vapor deposition
- 1.0375450 - FZÚ 2012 CZ eng K - Conference Paper (Czech conference)
Kromka, Alexander
Diamond chemical vapor deposition.
Proceedings of the 2nd Winter Education Seminar. Praha: FZÚ AV ČR, 2011 - (Remeš, Z.; Kromka, A.; Ledinský, M.), 11-16-28. ISBN 978-80-260-0911-5.
[Winter educational seminar /2./. Rokytnice n. J. (CZ), 16.02.2011-18.02.2011]
R&D Projects: GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA ČR(CZ) GAP108/11/0794
Institutional research plan: CEZ:AV0Z10100521
Keywords : diamond * thin film * chemical vapor deposition * hot filament * microwave plasma
Subject RIV: BM - Solid Matter Physics ; Magnetism
Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. Basic characteristics and common features of processes are pointed out with a respect to quality of grown films and standard process parameters. Novel and non-standard diamond syntheses techniques are briefly discussed.
Permanent Link: http://hdl.handle.net/11104/0208099
Number of the records: 1