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Influence of methane concentration on diamond film morphology and growth rate
- 1.0375449 - FZÚ 2012 CZ eng K - Conference Paper (Czech conference)
Ižák, Tibor - Babchenko, Oleg - Kromka, Alexander - Potměšil, Jiří - Hruška, Karel
Influence of methane concentration on diamond film morphology and growth rate.
Proceedings of the 2nd Winter Education Seminar. Praha: FZÚ AV ČR, 2011 - (Remeš, Z.; Kromka, A.; Ledinský, M.), s. 28-32. ISBN 978-80-260-0911-5.
[Winter educational seminar /2./. Rokytnice n. J. (CZ), 16.02.2011-18.02.2011]
R&D Projects: GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT(CZ) MEB0810081
Institutional research plan: CEZ:AV0Z10100521
Keywords : microcrystalline * nanocrystalline diamond * methane concentration * SEM * Raman
Subject RIV: BM - Solid Matter Physics ; Magnetism
In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
Permanent Link: http://hdl.handle.net/11104/0208098
Number of the records: 1