An investigation into graphene exfoliation and potential graphene application in MEMS devices

0375446 - GLÚ 2012 RIV US eng C - Conference Paper (international conference)
Fercana, G. - Kletetschka, Günther - Mikula, V. - Li, M.
An investigation into graphene exfoliation and potential graphene application in MEMS devices.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. Bellingham: SPIE - International Society Optical Engeneering, 2011 - (Garcia-Blanco, S.; Ramesham, R.), 79280P-79280P. Proceedings of SPIE, 7928. ISBN 978-0-8194-8465-9. ISSN 0277-786X.
[Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices /10./. San Francisco (US), 24.01.2011-25.01.2011]
Institutional research plan: CEZ:AV0Z30130516
Keywords : graphene-based * MEMS * transparent electrode
Subject RIV: DB - Geology ; Mineralogy

The design of microelectromecanical systems (MEMS) and micro-opto- electromechanical systems (MOEMS) are often materials-limited with respect to the efficiency and capability of the material. Graphene, a one atom thick honeycomb lattice of carbon, is a highly desired material for MEMS applications. Relevant properties of graphene include the material's optical transparency, mechanical strength, energy efficiency, and electrical and thermal conductivity due to its electron mobility. Aforementioned properties make graphene a strong candidate to supplant existing transparent electrode technology and replace the conventionally used material, indium-tin oxide. In this paper we present preliminary results on work toward integration of graphene with MEMS structures. We are studying mechanical exfoliation of highly ordered pyrolytic graphite (HOPG) crystals by repeatedly applying and separating adhesive materials from the HOPG surface.
Permanent Link: http://hdl.handle.net/11104/0208095