0375441 - FZÚ 2012 RIV CZ eng K - Conference Paper (Czech conference)
Domonkos, M. - Ižák, Tibor - Babchenko, Oleg - Kromka, Alexander - Hruška, Karel
Influence of CO₂ concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system.
Proceedings of the 2nd Winter Education Seminar. Praha: FZÚ AV ČR, 2011 - (Remeš, Z.; Kromka, A.; Ledinský, M.), s. 33-37. ISBN 978-80-260-0911-5.
[Winter educational seminar /2./. Rokytnice n. J. (CZ), 16.02.2011-18.02.2011]
R&D Projects: GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT(CZ) MEB0810081
Institutional research plan: CEZ:AV0Z10100521
Keywords : nanocrystalline diamond * large area growth * growth rate * CO2 addition * SEM * Raman Spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism

The diamond films were deposited in a pulsed linear antenna microwave plasma system. The influence of CO2 addition into the standard CH4/H2 gas mixture on the diamond film morphology was investigated. The concentration of CO2 varied from 0% up to 80% in CO2/CH4/H2 gas mixture. The film morphology, the growth rate and the ratio of sp3/sp2 carbon bonds were investigated. It was found that increasing of CO2 concentration resulted in enhanced growth rate (from 20 up to 36 nm/h). However, at very high CO2 concentrations (>40%) dominates etching instead of growth process. Moreover, we found that increasing of CO2 enhances the diamond film quality.
Permanent Link: http://hdl.handle.net/11104/0208091