0375381 - ÚPT 2012 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Urbánek, Michal - Kolařík, Vladimír
Scanning Probe Microscopy: Measuring on Hard Surfaces.
NANOCON 2011. 3rd International Conference. Ostrava: Tanger spol. s r. o, 2011, s. 701-704. ISBN 978-80-87294-27-7.
[NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
R&D Projects: GA MPO FR-TI1/576; GA MŠMT ED0017/01/01
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning probe microscopy * atomic force microscopy * hard surface samples measuring * image artifacts * polymer coatings
Subject RIV: JP - Industrial Processing

During a measurement by scanning probe microscopy (SPM) an image artifacts can appear in a measurement data. The source of image artifacts during an SPM measurement could be in parts of the SPM tool: mechanical system, piezoelectric crystal, scanner electronic. However, the main source of image artifact is the probe tip geometry and properties of the sample. For example, probe wearing, which occurs during the contact measurement on a sample with a hard surface, could result in heavy probe shape change, causing probe-related image artifacts. Measurement could appear problematic on a sample with periodical relief structure (e.g. gratings with sub 10 μm periodicity) prepared in hard materials (e.g. silicon), when the structure height is greater than about 500 nm. In this case, probe can easily get struck during the scanning, on the hard surface as well as at the high aspect ratio relief structure, causing image artifact thus reducing measurement quality.
Permanent Link: http://hdl.handle.net/11104/0208052