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Mn-doped ZnO thin films deposited by spray MOVPE

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    0373971 - FZÚ 2012 RIV PL eng C - Conference Paper (international conference)
    Sofer, Z. - Sedmidubský, D. - Huber, S. - Šaněk, F. - Nádherný, L. - Maryško, Miroslav - Hejtmánek, Jiří - Jurek, Karel - Mikulics, M.
    Mn-doped ZnO thin films deposited by spray MOVPE.
    EWMOVPE XIV. Wroclaw: Printing house of Wroclaw University of Technology, 2011 - (Prazmowska, J.), s. 83-86. ISBN 978-83-7493-599-9.
    [European Workshop on Metalorganic Vapor Phase Epitaxy /14./. Wrocław (PL), 05.06.2011-08.06.2011]
    R&D Projects: GA ČR GA104/09/0621
    Institutional research plan: CEZ:AV0Z10100521
    Keywords : ZnO * Mn doping * spintronics * spray MOVPE * magnetism
    Subject RIV: BM - Solid Matter Physics ; Magnetism

    Zinc oxide belongs to wide bandgap semiconductors.When doped by magn. impurities it may become a promising candidate for spintronic applications.The magn. behavior has been reported for layers doped with manganese,iron and other transition metals.However,the thin films growth of high quality layers is difficult due to the violent reaction of oxygen and zinc precursors.The high cost of substrates for homoepitaxial growth represents another problem.In our contribution we present the growth of ZnO and Mn doped ZnO layers by spray pyrolysis MOVPE.Zinc and manganese acetylacetonates and tetramethylheptadionates dissolved in methanol were used as precursors for layer deposition.The precursors were dosed in the reactor by liquid flow controlled and injected to the preheated reactor inlet by ultrasonic nebulizer.The horizontal quartz reactor is equipped with a Hastelloy susceptor and an induction heating system.The influence of deposition condition on the layer properties was investigated.
    Permanent Link: http://hdl.handle.net/11104/0006887

     
     
Number of the records: 1