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Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging
- 1.0373838 - FZÚ 2012 RIV US eng J - Journal Article
Straňák, V. - Bogdanowicz, R. - Drache, S. - Čada, Martin - Hubička, Zdeněk - Hippler, R.
Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging.
IEEE Transactions on Plasma Science. Roč. 39, č. 11 (2011), 2454-2455. ISSN 0093-3813. E-ISSN 1939-9375
R&D Projects: GA AV ČR KAN301370701; GA ČR GP202/09/P159; GA ČR GA202/09/0800
Grant - others:AVČR(CZ) M100100915
Institutional research plan: CEZ:AV0Z10100522
Keywords : magnetic confinement * plasma properties * plasma sources
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.174, year: 2011
Fast optical emission imaging was employed for dynamic study of dual-high-power impulse magnetron sputtering discharge. The sputtering sources were equipped with reversed polarity of magnets, i.e., so-called closed magnetic field between magnetrons. Plasma is confined in closed magnetic field between targets alternately employed as cathode/anode. This type of magnetic confinement affects the transport of electrons and also the ionization processes of neutral particles present in the plasma, as will be shown in this paper.
Permanent Link: http://hdl.handle.net/11104/0206898
Number of the records: 1