On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

0371420 - ÚFM 2012 RIV CZ eng O - Others
Souček, P. - Schmidtová, T. - Zábranský, L. - Buršíková, V. - Vašina, P. - Caha, O. - Buršík, Jiří - Peřina, V.
On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering.
Potential and Applications of Surface Nanotreatment of Polymers and Glass. Brno: MU Brno, 2011. s. 49-50
Institutional research plan: CEZ:AV0Z20410507
Keywords : carbon content * nc-TiC/a-C:H coatings * mechanical properties
Subject RIV: BL - Plasma and Gas Discharge Physics

Thick hard adherent nc-TiC/a-C:H coatings were prepared by a hybrid PVD-PECVD process of Ti terget sputtering in Ar/C2H2 atmosphere. The effect of carbon content on mechanical properties such as hardness, Young's modulus and internal stress is studied in this contribution.
Permanent Link: http://hdl.handle.net/11104/0204937