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Green Light Interferometry for Metrological SPM Positioning
- 1.0371198 - ÚPT 2012 FR eng C - Conference Paper (international conference)
Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
Green Light Interferometry for Metrological SPM Positioning.
Workshop on Metrological Atomic Force Microscope Instrumentation. Paris: LNE, 2011, s. 143.
[Workshop on Metrological Atomic Force Microscope Instrumentation. Trappes (FR), 07.02.2011-09.02.2011]
R&D Projects: GA ČR GA102/09/1276; GA ČR GA102/07/1179; GA AV ČR KAN311610701
Institutional research plan: CEZ:AV0Z20650511
Keywords : green light interferometry * scanning probe microscopy * nanometrology
Subject RIV: BH - Optics, Masers, Lasers
We present an arrangement for dimenstonal metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology Institute for calibration purposes and nanometrology. Traceabillty of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine.
Permanent Link: http://hdl.handle.net/11104/0204775
Number of the records: 1