TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

0370065 - ÚFM 2012 RIV IT eng O - Others
Buršíková, V. - Buršík, Jiří - Vašina, P. - Souček, P. - Zábranský, L. - Caha, O. - Jílek, M.
TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering.
10th Multinational Congress on Microscopy 2011. Urbino: Urbino University "Carlo Bo", 2011. s. 567-568
Institutional research plan: CEZ:AV0Z20410507
Keywords : nanocomposite * PVD * machanical properties
Subject RIV: BM - Solid Matter Physics ; Magnetism

Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3µm. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5µm thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate.
Permanent Link: http://hdl.handle.net/11104/0203976