Mapping of dopants in silicon by injection of electrons

0367280 - ÚPT 2012 RIV DE eng C - Conference Paper (international conference)
Hovorka, Miloš - Konvalina, Ivo - Frank, Luděk - Mikulík, P.
Mapping of dopants in silicon by injection of electrons.
MC 2011 - Microscopy Conference Kiel. Kiel: DGE, 2011, IM7.P198:1-2. ISBN 978-3-00-033910-3.
[MC 2011 - Microscopy Conference. Kiel (DE), 28.08.2011-02.09.2011]
R&D Projects: GA AV ČR IAA100650902; GA ČR GAP108/11/2270
Institutional research plan: CEZ:AV0Z20650511
Keywords : dopant * silicon * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Scanning electron microscope belongs to viable tools for mapping the density of dopants in semiconductors. For probing the silicon structures usually the electron beam is used at energies around 1 keV because of high contrasts between differently doped areas. However, also the very low landing energy range has proven itself an efficient tool for mapping the dopants. We have focused on p-type structures of various dopant densities. Imaging by means of secondary electrons (SE) and its quantifiability has been verified and the method was extended to very low energies where dynamical changes in the contrast have been observed.
Permanent Link: http://hdl.handle.net/11104/0202020