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Organometallic Ge precursors, their stability and vapour pressure measurement
- 1.0367084 - FZÚ 2012 FR eng C - Conference Paper (international conference)
Pangrác, Jiří - Hulicius, Eduard - Fulem, Michal - Vyskočil, Jan - Melichar, Karel - Šimeček, Tomislav
Organometallic Ge precursors, their stability and vapour pressure measurement.
IC-MOVPE XIV. Metz: UMI2958 GT-CNRS, 2008, s. 421-422.
[International Metal Organic Vapor Phase Epitaxy Conference /14./. Metz (FR), 01.06.2008-06.06.2008]
R&D Projects: GA AV ČR IAA100100719
Institutional research plan: CEZ:AV0Z10100521
Keywords : germanium precursors * vapour pressure * MOVPE
Subject RIV: BM - Solid Matter Physics ; Magnetism
The vapour pressure of three germanium precursors, TMOGe, TEOGe, and TDMAGe was measured using a static method.The results are in a good agreement with other methods. The mass spectra of Ge precursors at different temperatures were also studied.
Permanent Link: http://hdl.handle.net/11104/0201866
Number of the records: 1