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Direct growth of sub-micron diamond structures
- 1.0359632 - FZÚ 2012 CZ eng A - Abstract
Babchenko, Oleg - Verveniotis, Elisseos - Hruška, Karel - Ledinský, Martin - Kromka, Alexander - Rezek, Bohuslav
Direct growth of sub-micron diamond structures.
13th Joint Vacuum Conference - Programme and book of abstract. Brno: Tribun EU s.r.o., 2010 - (Vesely, M.; Vincze, A.; Vavra, I.). s. 139. ISBN 978-80-7399-969-8.
[Joint Vacuum Conference /13./. 20.06.2010-24.06.2010, Strbske Pleso]
R&D Projects: GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT LC510; GA AV ČR(CZ) KAN400480701
Institutional research plan: CEZ:AV0Z10100521
Keywords : selected area deposition * lithography * diamond
Subject RIV: BM - Solid Matter Physics ; Magnetism
Pre-treating the diamond seeds layer in buffer oxide etchant after employing optical and electron beam lithography was applied for selected area deposition of diamond structures. By chemical vapor deposition electrically active diamond micro- and nano-channels were fabricated. Advantages and limitations of employed strategy were discussed.
Permanent Link: http://hdl.handle.net/11104/0197382
Number of the records: 1