Analysis of a combined electrostatic and magnetic objective lens

0353109 - ÚPT 2011 CZ eng K - Conference Paper (Czech conference)
Konvalina, Ivo - Müllerová, Ilona
Analysis of a combined electrostatic and magnetic objective lens.
Mikroskopie 2010. Nové Město na Moravě: Československá mikroskopická společnost, 2010 - (Frank, L.; Hozák, P.), s. 41. ISBN N.
[Mikroskopie 2010. Nové Město na Moravě (CZ), 17.02.2010-18.02.2010]
R&D Projects: GA AV ČR IAA100650902
Institutional research plan: CEZ:AV0Z20650511
Keywords : photoemission electron microscopy * low energy electron microscopy * EOD software
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Cathode lens (CL) is an electron optical element commonly used in the photoemission electron microscopy (PEEM), low energy electron microscopy (LEEM) and last but not least in the scanning electron microscope (SEM). ens. The sequential arrangement of electrostatic and magnetic fields was considered.
Permanent Link: http://hdl.handle.net/11104/0006219