Optical and scanning electron microscopies in examination of ultrathin foils

0353051 - ÚPT 2011 CN eng A - Abstract
Konvalina, Ivo - Hovorka, Miloš - Fořt, Tomáš - Müllerová, Ilona
Optical and scanning electron microscopies in examination of ultrathin foils.
Focus on Microscopy - FOM 2010. Shanghai: Shanghai Jiao Tong University, 2010. s. 224.
[Focus on Microscopy - FOM 2010. 28.03.2010-31.03.2010, Shanghai]
R&D Projects: GA AV ČR IAA100650902
Institutional research plan: CEZ:AV0Z20650511
Keywords : very low energy electrons * laser confocal microscope * free-standing ultra thin films * very low energy transmission mode
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Very low energy scanning transmission electron microscopy is emerging as a novel tool for examination of ultrathin foils [1] to learn more about the electron structure of solids. The electron micrographs provide image contrasts governed by the “effective thickness” of the sample proportional to the inner potential and at lowest energies the local density of electron states in the direction of impact of the electron wave starts to dominate. The optical methods are used during the sample preparation and thickness measurement of the layers. The laser confocal microscope Olympus Lext OLS 3100 was used for preliminary observations of the 10 nm C foil prepared by magnetron sputtering in nitrogen atmosphere on a flat glass covered by a disaccharide layer.
Permanent Link: http://hdl.handle.net/11104/0192399