Number of the records: 1
SLEEM study of FIB induced damage
- 1.0352943 - ÚPT 2011 JP eng A - Abstract
Mikmeková, Šárka - Matsuda, K. - Watanabe, K. - Müllerová, Ilona - Frank, Luděk
SLEEM study of FIB induced damage.
8th Japanese-Polish Joint Seminar on Micro and Nano Analysis. Kyoto: Kyoto University, 2010. s. 7-03.
[Japanese-Polish Joint Seminar on Micro and Nano Analysis /8./. 05.09.2010-08.09.2010, Kyoto]
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning low energy electron microscope * focused ion beam technique * SRIM2008
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
In recent years, the focused ion beam (FIB) technique has found broad applications in the field of materials science. It is an extremely important tool for site-specific analysis, as well as for deposition and ablation of materials. However, the FIB can induce a reconfiguration or destruction of the specimen structure and in crystalline materials it can create an amorphous layer on the surface.
Permanent Link: http://hdl.handle.net/11104/0192319
Number of the records: 1