Scanning transmission low energy electron microscopy

0352939 - ÚPT 2011 US eng A - Abstract
Müllerová, Ilona - Hovorka, Miloš - Frank, Luděk
Scanning transmission low energy electron microscopy.
The 7th International Workshop on LEEM/PEEM. New York: IBM T.J. Watson Research Center, 2010. s. 25.
[LEEM/PEEM /7./. 08.08.2010-13.08.2010, New York]
R&D Projects: GA AV ČR IAA100650902
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning electron microscope * he low energy electron microscope * graphene
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The standard scanning electron microscope (SEM) and the low energy electron microscope (LEEM) examine surface structures using reflected electrons. The cathode lens (CL) principle with negatively biased sample, used in emission microscopes, was introduced in the SEM in order to work at arbitrarily low energy. Anode of the CL, inserted to above the sample, consists of a one channel scintillation detector with a small central bore (0.3mm) and collects reflected electrons accelerated in the CL field. Another detector, based on the PIN structure, is positioned below the sample and acquires signal transmitted through thin foils and similarly accelerated. In the very low energy range we rely on the inelastic mean free path of electrons steeply extending below about 50 eV, and hence on increased penetrability of electrons, at last through crystallinic layers.
Permanent Link: http://hdl.handle.net/11104/0192317