RBS/channelling study of Er+ ion-implanted lithium niobate structure after an annealing procedure

0332850 - ÚJF 2010 GB eng A - Abstract
Macková, Anna - Malinský, Petr - Švecová, B. - Nekvindová, P. - Grotzschel, R.
RBS/channelling study of Er+ ion-implanted lithium niobate structure after an annealing procedure.
Abstract book, 19th International conference on Ion beam analysis. Cambridge: IOP, Institute of physics, 2009.
[19th International conference on Ion beam analysis. 07.09.2009-11.09.2009, Cambridge]
R&D Projects: GA MŠMT(CZ) LC06041
Institutional research plan: CEZ:AV0Z10480505
Keywords : Lithium niobate * Erbium * Ion implantation * RBS/channelling
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders

Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component. We have focused on the structure of the Er:LiNbO3 layers, which are fabricated by 330 keV erbium ion implantation in the X, Z and two types of Y crystallographic cuts of LiNbO3 and annealed at 350°C to reconstruct the as-implanted layer and to avoid the evolution of Er precipitates. The depth distribution of the implanted Er was measured by Rutherford Backscattering Spectroscopy (RBS). The defect distribution and structural changes were described using the RBS/channelling method. The data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the during the restoration process. The deepest modified layer was observed in the perpendicular Y cut, which also exhibits the lowest reconstruction after annealing. The shallowest depth of modification and good recovery after annealing were observed in the Z cut of LiNbO3.
Permanent Link: http://hdl.handle.net/11104/0177978